التفاصيل البيبلوغرافية
العنوان: |
The Formation of Ru/ZnO Multifunctional Bilayer through Area Selective Atomic Layer Deposition for Advanced Cu Metallization |
المؤلفون: |
Mori, Yuki, Cheon, Taehoon, Kotsugi, Yohei, Kim, Youn-Hye, Kwon, Woobin, Park, Young-Bae, Kim, Soo-Hyun |
المصدر: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) Advanced Metallization Conference (MAM)(IITC/MAM), 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for. :1-3 May, 2023 |
Relation: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) |
قاعدة البيانات: |
IEEE Xplore Digital Library |