التفاصيل البيبلوغرافية
| العنوان: |
The Formation of Ru/ZnO Multifunctional Bilayer through Area Selective Atomic Layer Deposition for Advanced Cu Metallization |
| المؤلفون: |
Mori, Yuki, Cheon, Taehoon, Kotsugi, Yohei, Kim, Youn-Hye, Kwon, Woobin, Park, Young-Bae, Kim, Soo-Hyun |
| المصدر: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) Advanced Metallization Conference (MAM)(IITC/MAM), 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for. :1-3 May, 2023 |
| Relation: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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