التفاصيل البيبلوغرافية
| العنوان: |
Towards knowledge-enhanced process models for semiconductor fabrication |
| المؤلفون: |
Rothe, Tom, Sayyed, Mudassir Ali, Langer, Jan, Gottfried, Knut, Schuster, Jorg, Stoll, Martin, Kuhn, Harald |
| المصدر: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) Advanced Metallization Conference (MAM)(IITC/MAM), 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for. :1-3 May, 2023 |
| Relation: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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