التفاصيل البيبلوغرافية
العنوان: |
Towards knowledge-enhanced process models for semiconductor fabrication |
المؤلفون: |
Rothe, Tom, Sayyed, Mudassir Ali, Langer, Jan, Gottfried, Knut, Schuster, Jorg, Stoll, Martin, Kuhn, Harald |
المصدر: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) Advanced Metallization Conference (MAM)(IITC/MAM), 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for. :1-3 May, 2023 |
Relation: |
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) |
قاعدة البيانات: |
IEEE Xplore Digital Library |