التفاصيل البيبلوغرافية
| العنوان: |
Ion implantation-induced damage in 4H-SiC detected by photo-modulated reflectance |
| المؤلفون: |
Zolnai, Z., Szivos, J., Sepsi, O., Ujhelyi, F., Bozoki, Z., Denes, B., Ullrich, D., Flender, R., Miron, D., Kovacs, B. M., Deli, Z. F., Kovacs, K., Nadudvari, G., Balogh, L. |
| المصدر: |
2023 21st International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2023 21st International Workshop on. :1-3 Jun, 2023 |
| Relation: |
2023 21st International Workshop on Junction Technology (IWJT) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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