التفاصيل البيبلوغرافية
| العنوان: |
Integration of a Stacked Contact MOL for Monolithic CFET |
| المؤلفون: |
Vega-Gonzalez, Victor, Radisic, D., Chan, Bt, Choudhury, S., Wang, S., Mingardi, A., Le, Q. Toan, Decoster, H., Oniki, Y., Puttarame, P., Vandersmissen, K., Soulie, J.-P., Peter, A., Batuk, A. Sepulveda. D., Martinez, G. T., Richard, O., Boemmels, J., Biesemans, S., Dentoni, E., Horiguchi, N., Park, S., Tokei, Z. |
| المصدر: |
2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2023 IEEE Symposium on. :1-2 Jun, 2023 |
| Relation: |
2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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