Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

التفاصيل البيبلوغرافية
العنوان:	Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions
المؤلفون:	Franco, J., Arimura, H., de Marneffe, J.-F., Brus, S., Ritzenthaler, R., Litta, E. Dentoni, Croes, K., Kaczer, B., Horiguchi, N.
المصدر:	2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2023 IEEE Symposium on. :1-2 Jun, 2023
Relation:	2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
قاعدة البيانات:	IEEE Xplore Digital Library