Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET

التفاصيل البيبلوغرافية
العنوان: Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET
المؤلفون: Arimura, H., Brus, S., Franco, J., Oniki, Y., Vandooren, A., Conard, T., Chan, B.-T., Kannan, B., Samiee, M., Li, W., Deminskyi, P., Shero, E., Bakke, J., Jourdan, N., Verni, G. Alessio, Maes, J. W., Givens, M., Ragnarsson, L.-A., Mitard, J., Litta, E. Dentoni, Horiguchi, N.
المصدر: 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2023 IEEE Symposium on. :1-2 Jun, 2023
Relation: 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784863488069
تدمد:21589682
DOI:10.23919/VLSITechnologyandCir57934.2023.10185430