Maskless Lithography for High-Density Package Redistribution Layers

التفاصيل البيبلوغرافية
العنوان: Maskless Lithography for High-Density Package Redistribution Layers
المؤلفون: Murali, Prahalad, Nimbalkar, Pratik, Kathaperumal, Mohanalingam, Losego, Mark D., Tummala, Rao, Swaminathan, Madhavan
المصدر: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2023 IEEE 73rd. :147-151 May, 2023
Relation: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350334982
تدمد:23775726
DOI:10.1109/ECTC51909.2023.00033