دورية أكاديمية
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment
| العنوان: | Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment |
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| المؤلفون: | Yoon, T.W., Choi, M., Hong, S.J. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 36(4):653-665 Nov, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2023.3301024 |