مؤتمر
A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Automatic Machine Learning
| العنوان: | A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Automatic Machine Learning |
|---|---|
| المؤلفون: | Shi, Yumeng, Cai, Yu, Chen, Yining |
| المصدر: | 2023 6th International Conference on Artificial Intelligence and Big Data (ICAIBD) Artificial Intelligence and Big Data (ICAIBD), 2023 6th International Conference on. :299-304 May, 2023 |
| Relation: | 2023 6th International Conference on Artificial Intelligence and Big Data (ICAIBD) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781665491259 9781665491242 |
|---|---|
| تدمد: | 27693554 |
| DOI: | 10.1109/ICAIBD57115.2023.10206117 |