مؤتمر
The Investigation of CF3I For High-Aspect-Ratio Cryogenic Dielectric Etch
العنوان: | The Investigation of CF3I For High-Aspect-Ratio Cryogenic Dielectric Etch |
---|---|
المؤلفون: | Hou, Jianqiu, Xu, Vina, Zhang, Kai, Wu, Ziyang |
المصدر: | 2023 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2023 China. :1-4 Jun, 2023 |
Relation: | 2023 China Semiconductor Technology International Conference (CSTIC) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9798350311006 9798350310993 |
---|---|
DOI: | 10.1109/CSTIC58779.2023.10219239 |