مؤتمر
Study on the Effect of Water Spraying Mode on the N Content of Wafer Surface after SC1 Cleaning in Light Doping Process
| العنوان: | Study on the Effect of Water Spraying Mode on the N Content of Wafer Surface after SC1 Cleaning in Light Doping Process |
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| المؤلفون: | Wang, Jinlei, Guan, Fenglin, Hang, Mingguang, Jia, Lili, Li, Fang, Cheng, Xinhua |
| المصدر: | 2023 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2023 China. :1-3 Jun, 2023 |
| Relation: | 2023 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9798350311006 9798350310993 |
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| DOI: | 10.1109/CSTIC58779.2023.10219384 |