التفاصيل البيبلوغرافية
| العنوان: |
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition |
| المؤلفون: |
Petukhova, Darya E., Kichay, Vadim N., Lebedev, Mikhail S. |
| المصدر: |
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM) Young Professionals in Electron Devices and Materials (EDM), 2023 IEEE 24th International Conference of. :40-44 Jun, 2023 |
| Relation: |
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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