Foreign Material Identification by FTIR Characterization with Novel FIB Lamella Preparation

التفاصيل البيبلوغرافية
العنوان: Foreign Material Identification by FTIR Characterization with Novel FIB Lamella Preparation
المؤلفون: Lan, Guoyu, Otte, Rik, Goumans, Leon, Hsu, Andy, Roberts, Harry, Kung, Terry
المصدر: 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2023 IEEE International Symposium on the. :1-4 Jul, 2023
Relation: 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350301649
تدمد:19461550
DOI:10.1109/IPFA58228.2023.10249190