دورية أكاديمية
Nonequilibrium Plasma Cleaning of Organic Contaminants on the Surface of Diffraction Gratings
| العنوان: | Nonequilibrium Plasma Cleaning of Organic Contaminants on the Surface of Diffraction Gratings |
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| المؤلفون: | Bai, Q., Liu, X., Sun, H., Li, Y., Chen, J., Zhang, P., Yuan, X. |
| المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 51(10):3008-3017 Oct, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00933813 19399375 |
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| DOI: | 10.1109/TPS.2023.3310990 |