التفاصيل البيبلوغرافية
العنوان: |
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time |
المؤلفون: |
Wang, Jufeng, Leng, Tingting, Liu, Chunfeng, Zhou, MengChu |
المصدر: |
2023 IEEE 19th International Conference on Automation Science and Engineering (CASE) Automation Science and Engineering (CASE), 2023 IEEE 19th International Conference on. :1-6 Aug, 2023 |
Relation: |
2023 IEEE 19th International Conference on Automation Science and Engineering (CASE) |
قاعدة البيانات: |
IEEE Xplore Digital Library |