Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time

التفاصيل البيبلوغرافية
العنوان:	Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time
المؤلفون:	Wang, Jufeng, Leng, Tingting, Liu, Chunfeng, Zhou, MengChu
المصدر:	2023 IEEE 19th International Conference on Automation Science and Engineering (CASE) Automation Science and Engineering (CASE), 2023 IEEE 19th International Conference on. :1-6 Aug, 2023
Relation:	2023 IEEE 19th International Conference on Automation Science and Engineering (CASE)
قاعدة البيانات:	IEEE Xplore Digital Library