دورية أكاديمية
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays
| العنوان: | High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays |
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| المؤلفون: | Pestana, T.G., Pinto, R.M.R., Dias, R.A., Chu, V., Conde, J.P. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(6):562-573 Dec, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2023.3315074 |