مؤتمر
Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory
| العنوان: | Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory |
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| المؤلفون: | Dubreuil, T., Barraud, S., Pedini, J.-M., Hartmann, J.-M., Boulard, F., Sarrazin, A., Gharbi, A., Sturm, J., Lambert, A., Martin, S., Castellani, N., Anotta, A., Magalhaes-Lucas, A., Souhaite, A., Andrieu, F. |
| المصدر: | ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), ESSDERC 2023 - IEEE 53rd European. :117-120 Sep, 2023 |
| Relation: | ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9798350304237 9798350304220 |
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| تدمد: | 23786558 |
| DOI: | 10.1109/ESSDERC59256.2023.10268513 |