Comparative life cycle assessment of hybrid bonding and copper pillar die-to-wafer 3D integrations for sub-THz applications

التفاصيل البيبلوغرافية
العنوان: Comparative life cycle assessment of hybrid bonding and copper pillar die-to-wafer 3D integrations for sub-THz applications
المؤلفون: Roulleau, Lea, Vauche, Laura, Valorge, Olivier, Dubarry, Christophe, Cioccio, Lea Di
المصدر: 2023 18th European Microwave Integrated Circuits Conference (EuMIC) Microwave Integrated Circuits Conference (EuMIC), 2023 18th European. :390-393 Sep, 2023
Relation: 2023 18th European Microwave Integrated Circuits Conference (EuMIC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9782874870736
DOI:10.23919/EuMIC58042.2023.10288972