دورية أكاديمية
Combining Lissajous Frequency Modulation With 250 nm Piezoresistive Sensing in MEMS Gyroscope: Theoretical Advantages and Practical Challenges
العنوان: | Combining Lissajous Frequency Modulation With 250 nm Piezoresistive Sensing in MEMS Gyroscope: Theoretical Advantages and Practical Challenges |
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المؤلفون: | Gianollo, M., Gadola, M., Bettini, G., Padovani, C., Robert, P., Langfelder, G. |
المصدر: | IEEE Sensors Letters IEEE Sens. Lett. Sensors Letters, IEEE. 7(11):1-4 Nov, 2023 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 24751472 |
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DOI: | 10.1109/LSENS.2023.3326716 |