Design of Gas Pressure Control System With the Silicon Resonant Pressure Sensor

التفاصيل البيبلوغرافية
العنوان:	Design of Gas Pressure Control System With the Silicon Resonant Pressure Sensor
المؤلفون:	Chang, Mingtang, Wang, Junbo, Shang, Yanlong
المصدر:	2023 IEEE 7th Information Technology and Mechatronics Engineering Conference (ITOEC) Information Technology and Mechatronics Engineering Conference (ITOEC), 2023 IEEE 7th. 7:2142-2146 Sep, 2023
Relation:	2023 IEEE 7th Information Technology and Mechatronics Engineering Conference (ITOEC)
قاعدة البيانات:	IEEE Xplore Digital Library