Implementation of an accelerated electrical ageing protocol for Capacitive Micromachined Ultrasonic Transducers (CMUT)

التفاصيل البيبلوغرافية
العنوان: Implementation of an accelerated electrical ageing protocol for Capacitive Micromachined Ultrasonic Transducers (CMUT)
المؤلفون: Bouchez, Pierre, Heller, Jacques, Senegond, Nicolas, Lemaire, Etienne, Meynier, Cyril, Certon, Dominique
المصدر: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023
Relation: 2023 IEEE International Ultrasonics Symposium (IUS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350346459
تدمد:19485727
DOI:10.1109/IUS51837.2023.10306710