Improvement of Shear-Mode Electromechanical Coupling of c-Axis Parallel Oriented ZnO Film by Limiting Particle Irradiation Direction During RF Magnetron Sputtering

التفاصيل البيبلوغرافية
العنوان:	Improvement of Shear-Mode Electromechanical Coupling of c-Axis Parallel Oriented ZnO Film by Limiting Particle Irradiation Direction During RF Magnetron Sputtering
المؤلفون:	Tomiyama, Naoki, Sato, Taiki, Takayanagi, Shinji, Yanagitani, Takahiko
المصدر:	2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023
Relation:	2023 IEEE International Ultrasonics Symposium (IUS)
قاعدة البيانات:	IEEE Xplore Digital Library