التفاصيل البيبلوغرافية
| العنوان: |
Photolithography Hotspot Detection Based on Deep Learning LHD Model |
| المؤلفون: |
Jiang, Xiaolong, Ren, Kun, Lin, Zebang, Gao, Dawei, Wu, Yongyu, Jin, Yadong, Du, Chunshan, Tian, Zhengguo, Zou, Sihang, Sun, Chenwei, Hu, Xinyi, Wan, Qijian |
| المصدر: |
2023 International Workshop on Advanced Patterning Solutions (IWAPS) Advanced Patterning Solutions (IWAPS), 2023 International Workshop on. :1-5 Oct, 2023 |
| Relation: |
2023 International Workshop on Advanced Patterning Solutions (IWAPS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
