Sustainability-Aware Technology Development at Applied Materials

التفاصيل البيبلوغرافية
العنوان: Sustainability-Aware Technology Development at Applied Materials
المؤلفون: Gross, B. J., Neville Reyes, E., Kapadia, S.
المصدر: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Relation: 2023 International Electron Devices Meeting (IEDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350327670
تدمد:2156017X
DOI:10.1109/IEDM45741.2023.10413690