First Demonstration of Monolithic Self-aligned Heterogeneous Nanosheet Channel Complementary FETs with Matched VT by Band Alignments of Individual Channels

التفاصيل البيبلوغرافية
العنوان: First Demonstration of Monolithic Self-aligned Heterogeneous Nanosheet Channel Complementary FETs with Matched VT by Band Alignments of Individual Channels
المؤلفون: Tu, Chien-Te, Hsieh, Wan-Hsuan, Chen, Yu-Rui, Huang, Bo-Wei, Liao, Yu-Tsung, Chen, Wei-Jen, Liu, Yi-Chun, Cheng, Chun-Yi, Chou, Hung-Chun, Lu, Hao-Yi, Hsin, Cheng-Hsien, He, Geng-Min, Woo, Dong Soo, Chueh, Shee-Jier, Liu, C. W.
المصدر: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Relation: 2023 International Electron Devices Meeting (IEDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350327670
تدمد:2156017X
DOI:10.1109/IEDM45741.2023.10413805