التفاصيل البيبلوغرافية
| العنوان: |
Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods |
| المؤلفون: |
Kleinholz, Cathleen, Fischer, Michael, Gutzeit, Nam, Cyriax, Andrea, Hintz, Michael, Ortlepp, Thomas, Muller, Jens |
| المصدر: |
2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC) Microelectronics and Packaging Conference & Exhibition (EMPC), 2023 24th European. :1-6 Sep, 2023 |
| Relation: |
2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
