A MEMS Fast Steering Mirror with 10 mm Aperture for Free-Space Optical Communication

التفاصيل البيبلوغرافية
العنوان: A MEMS Fast Steering Mirror with 10 mm Aperture for Free-Space Optical Communication
المؤلفون: Liu, Yichen, Su, Yongquan, Weng, Zhichao, Yang, Yi, Wang, Yang, Wang, Lihao, Wu, Zhenyu
المصدر: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1011-1014 Jan, 2024
Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350357929
تدمد:21601968
DOI:10.1109/MEMS58180.2024.10439423