Femtosecond Laser Direct Writing for Cross-Linked Liquid Crystal Polymer Microactuator Construction

التفاصيل البيبلوغرافية
العنوان: Femtosecond Laser Direct Writing for Cross-Linked Liquid Crystal Polymer Microactuator Construction
المؤلفون: Wang, Yong, Wang, Yingzhi, Qian, Jingui, Xie, Jin
المصدر: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :761-764 Jan, 2024
Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350357929
تدمد:21601968
DOI:10.1109/MEMS58180.2024.10439462