A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography

التفاصيل البيبلوغرافية
العنوان: A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography
المؤلفون: Seong, Dong Wook, Kuk Bae, Sung, Seo, Jung Hwan
المصدر: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :867-870 Jan, 2024
Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350357929
تدمد:21601968
DOI:10.1109/MEMS58180.2024.10439537