التفاصيل البيبلوغرافية
| العنوان: |
Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology |
| المؤلفون: |
Zhu, Kanglai, You, Minmin, Ran, Yongpeng, Shen, Yudong, Yang, Bin, Liu, Jingquan |
| المصدر: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :991-994 Jan, 2024 |
| Relation: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
Full Text Finder