التفاصيل البيبلوغرافية
العنوان: |
Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection |
المؤلفون: |
Abe, Yosuke, Akanuma, Goichi, Shinkawa, Mizuki, Hashiguchi, Tsuyoshi, Sato, Masaaki, Suzuki, Shuichi, Sakai, Atsushi, Ishimoto, Yukiyoshi |
المصدر: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1007-1010 Jan, 2024 |
Relation: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |