Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection

التفاصيل البيبلوغرافية
العنوان:	Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection
المؤلفون:	Abe, Yosuke, Akanuma, Goichi, Shinkawa, Mizuki, Hashiguchi, Tsuyoshi, Sato, Masaaki, Suzuki, Shuichi, Sakai, Atsushi, Ishimoto, Yukiyoshi
المصدر:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1007-1010 Jan, 2024
Relation:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library