800× Non-Distortion Magnified Visualization of Deep Sub-Nanometer MEMS Vibrations Using a Camera

التفاصيل البيبلوغرافية
العنوان:	800× Non-Distortion Magnified Visualization of Deep Sub-Nanometer MEMS Vibrations Using a Camera
المؤلفون:	Zang, Shuke, Wu, Jiahao, Zhang, Wenming, Shao, Lei
المصدر:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :927-930 Jan, 2024
Relation:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library