Light-stimulated ionic etching of semiconductor heterostructures

التفاصيل البيبلوغرافية
العنوان: Light-stimulated ionic etching of semiconductor heterostructures
المؤلفون: Serdobintsev, A.A., Karasev, S.A., Rokakh, A.G., Stetsura, S.V., Zhukov, A.G.
المصدر: Fifth International Conference on Actual Problems of Electron Devices Engineering Electron devices engineering Actual Problems of Electron Devices Engineering, 2002. (APEDE 2002). Fifth International Conference on. :250-254 2002
Relation: Fifth International Conference on Actual Problems of Electron Devices Engineering (APEDE'2002)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:5743310653
9785743310654
DOI:10.1109/APEDE.2002.1044937