Structural Design and Modeling of MEMS-based Single Axis Capacitive Accelerometer

التفاصيل البيبلوغرافية
العنوان: Structural Design and Modeling of MEMS-based Single Axis Capacitive Accelerometer
المؤلفون: Thu, Paing Soe, Kalugin, Victor V., Kochurina, Elena S., Ta, Thu
المصدر: 2024 Conference of Young Researchers in Electrical and Electronic Engineering (ElCon) Young Researchers in Electrical and Electronic Engineering (ElCon), 2024 Conference of. :559-564 Jan, 2024
Relation: 2024 Conference of Young Researchers in Electrical and Electronic Engineering (ElCon)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350360639
9798350360646
تدمد:23766565
DOI:10.1109/ElCon61730.2024.10468256