Simulation-based approach in design of low stress Bowl-shaped Micro Hemispherical Resonators

التفاصيل البيبلوغرافية
العنوان: Simulation-based approach in design of low stress Bowl-shaped Micro Hemispherical Resonators
المؤلفون: Zhang, Yinan, Zhou, Bin, Zhang, Ruixue, Gu, Haoyu, Wei, Qi, Zhang, Rong
المصدر: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024
Relation: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350316698
تدمد:23773480
DOI:10.1109/INERTIAL60399.2024.10502080