Semiconductor Fabs & Sustainability

التفاصيل البيبلوغرافية
العنوان: Semiconductor Fabs & Sustainability
المؤلفون: Ayalasomayajula, Neela, Mathew, Rony David
المصدر: 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2024 8th IEEE. :1-3 Mar, 2024
Relation: 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350371529
DOI:10.1109/EDTM58488.2024.10511479