التفاصيل البيبلوغرافية
| العنوان: |
Influence of ALD pulse times and deposition temperature on electrical properties and reliability of MIM decoupling capacitors based on Al-doped ZrO2 high-κ dielectric in BEoL conditions |
| المؤلفون: |
Falidas, Konstantinos Efstathios, Kuhnel, Kati, Everding, Maximilian, Czernohorsky, Malte, Heitmann, Johannes |
| المصدر: |
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2024 8th IEEE. :1-3 Mar, 2024 |
| Relation: |
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
