التفاصيل البيبلوغرافية
| العنوان: |
A Time-Matched SiO2-Layer Etch for Advanced MEMS Foundry Processesd Multi-Project Chip (MPC) |
| المؤلفون: |
Kumar, Sushil, Joshi, Khanjan, Singh, Pushpapraj |
| المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :437-440 Jun, 2023 |
| Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
