التفاصيل البيبلوغرافية
العنوان: |
Nonlinearity Compensation for Mems Pressure Sensors with Piezoresistors at the Neutral Position |
المؤلفون: |
Keulemans, Grim, van der Wiel, Appo, Maes, Ben, Ramezani, Maliheh, Kraft, Michael, Wang, Chen |
المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :112-115 Jun, 2023 |
Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
قاعدة البيانات: |
IEEE Xplore Digital Library |