Nonlinearity Compensation for Mems Pressure Sensors with Piezoresistors at the Neutral Position

التفاصيل البيبلوغرافية
العنوان: Nonlinearity Compensation for Mems Pressure Sensors with Piezoresistors at the Neutral Position
المؤلفون: Keulemans, Grim, van der Wiel, Appo, Maes, Ben, Ramezani, Maliheh, Kraft, Michael, Wang, Chen
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :112-115 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021