التفاصيل البيبلوغرافية
العنوان: |
A Two Degree-of-Freedom MEMS Mirror Driven by Internal Resonance Using Piezoelectric Transducers |
المؤلفون: |
Wang, Changhao, Chen, Jianlin, Wang, Nan, Gu, Yuandong |
المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2121-2124 Jun, 2023 |
Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
قاعدة البيانات: |
IEEE Xplore Digital Library |