A Two Degree-of-Freedom MEMS Mirror Driven by Internal Resonance Using Piezoelectric Transducers

التفاصيل البيبلوغرافية
العنوان: A Two Degree-of-Freedom MEMS Mirror Driven by Internal Resonance Using Piezoelectric Transducers
المؤلفون: Wang, Changhao, Chen, Jianlin, Wang, Nan, Gu, Yuandong
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2121-2124 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021