التفاصيل البيبلوغرافية
| العنوان: |
Development of piezoelectric micromachined ultrasonic transducer with dual heterogeneous piezoelectric thin film stacking |
| المؤلفون: |
Qi, Xuanmeng, Yoshida, Shinya, Moridi, Mohssen, Risquez, Sarah, Ghosh, Anirban, Tanaka, Shuji |
| المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :857-860 Jun, 2023 |
| Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
