Large Stroke Piezo Mems Mirror for High-Speed Fourier Transform Spectroscopy

التفاصيل البيبلوغرافية
العنوان: Large Stroke Piezo Mems Mirror for High-Speed Fourier Transform Spectroscopy
المؤلفون: Pribosek, Jaka, Lagosh, Anton, Aubock, Gerald
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1449-1452 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021