Design And Validation Of The First Z-Axis Mems Accelerometer With In-Plane Readout

التفاصيل البيبلوغرافية
العنوان: Design And Validation Of The First Z-Axis Mems Accelerometer With In-Plane Readout
المؤلفون: Gattere, Gabriele, Zega, Valentina, Riani, Manuel, Rizzini, Francesco, Maspero, Federico
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1739-1742 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021