A Three-Axis Co-Oscillating Vector Hydrophone Based on MEMS Electrochemistry

التفاصيل البيبلوغرافية
العنوان: A Three-Axis Co-Oscillating Vector Hydrophone Based on MEMS Electrochemistry
المؤلفون: Hu, Lintao, Liang, Tian, Sun, Zhenyu, Zhu, Maoqi, Zhang, Mingbo, Wang, Junbo, Chen, Deyong, Chen, Jian
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1567-1570 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021