التفاصيل البيبلوغرافية
| العنوان: |
Imaging Resonant MEMS with Ultra-Broad Spectral Vibrometry from 1000 Hz to 10 GHz |
| المؤلفون: |
Peng, Zhao-Liang, Cheng, Jing-Jie, Wu, Jia-Hao, Shao, Lei, Zhang, Wen-Ming |
| المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1970-1973 Jun, 2023 |
| Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
