التفاصيل البيبلوغرافية
| العنوان: |
Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer |
| المؤلفون: |
Garcia, Ines S., Fernandes, Jose, Queiroz, Jose B., Calaza, Carlos, Moreira, Jose, Dias, Rosana A., Alves, Filipe S. |
| المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1579-1582 Jun, 2023 |
| Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
