التفاصيل البيبلوغرافية
| العنوان: |
Stress Induced Gap Closing Electrodes for Silicon Resonators Enabling Low Bias Voltage and Equivalent Resistance |
| المؤلفون: |
Yu, Hao, Sun, Ke, Zheng, Chaoyue, Wang, Fang, Yang, Heng, Li, Xinxin |
| المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1798-1800 Jun, 2023 |
| Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
