مؤتمر
Stress Induced Gap Closing Electrodes for Silicon Resonators Enabling Low Bias Voltage and Equivalent Resistance
العنوان: | Stress Induced Gap Closing Electrodes for Silicon Resonators Enabling Low Bias Voltage and Equivalent Resistance |
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المؤلفون: | Yu, Hao, Sun, Ke, Zheng, Chaoyue, Wang, Fang, Yang, Heng, Li, Xinxin |
المصدر: | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1798-1800 Jun, 2023 |
Relation: | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
قاعدة البيانات: | IEEE Xplore Digital Library |
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