Temperature Compensation In Cmos-Mems Oscillators Via Folded-Anchor Resonator Geometrical Tuning

التفاصيل البيبلوغرافية
العنوان: Temperature Compensation In Cmos-Mems Oscillators Via Folded-Anchor Resonator Geometrical Tuning
المؤلفون: Perello-Roig, Rafel, Barcelo, Salvador, Verd, Jaume, Bota, Sebastia, Segura, Jaume
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :513-516 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021