An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform

التفاصيل البيبلوغرافية
العنوان:	An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform
المؤلفون:	Yasunaga, Shun, Misumi, Kei, Mizushima, Ayako, Toyokura, Atsushi, Ota, Etsuko, Inoue, Yurie, Fujiwara, Makoto, Kawai, Noriko, Yoda, Mitsuhiro, Tsuboi, Shinji, Sawamura, Tomoki, Higo, Akio, Nakane, Ryosho, Ochiai, Yukinori, Mita, Yoshio
المصدر:	2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2024 IEEE 36th International Conference on. :1-4 Apr, 2024
Relation:	2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
قاعدة البيانات:	IEEE Xplore Digital Library